MEMS

MEMS

MEMS mirror for optical scanners

Overview

This product series features compact MEMS (Micro Electro Mechanical Systems) mirrors utilizing semiconductor microfabrication technology to achieve high-speed, high-precision two-axis optical scanning. With fast response and low power consumption, they are suitable for a wide range of applications including displays, optical sensing, and 3D measurement. Despite their compact form factor, they deliver excellent scanning performance, making them ideal core components for next-generation optical systems.

Our MEMS mirrors offer superior long lifetime and reliability compared to competing products, maintaining stable operation over extended periods. Additionally, our proprietary design minimizes crosstalk between drive axes, ensuring high-precision optical scanning even in demanding applications. These features make them a dependable solution for advanced fields such as display systems and optical metrology.

Features

Item Description
Drive Method Electromagnetic Actuation
Structure Two-axis MEMS Mirror
Scanning Method Horizontal: Resonant / Vertical: Non-resonant (Raster Scan)
Optical Performance Wide Optical Deflection Angle
Reliability Long Lifetime / High Reliability
Electrical Characteristics Low Voltage Operation / Low Power Consumption
Mirror Surface Flat Reflective Surface

CG0006AR (Mirror Diameter: φ3.6×4.0mm)

mems_mirror_CG0006AR_en

Product Group

MEMS Mirror for Optical Scanners

Overview

Among our lineup of MEMS mirrors for optical scanners, this model features a medium-sized mirror, enabling high-speed and high-precision 2D scanning while maintaining sufficient reflective area. It is suitable for a wide range of applications such as display projection and optical measurement, offering excellent versatility with a balanced performance-to-size ratio.

Specifications

mems_mirror_overview_CG0006AR_en


Main Applications

This product is various optical devices, including:

・3DLiDAR
・HUD (Head-Up Display)
・Pico Projector
・HMD (Head-Mounted Display)
・3D Printer

CG0007AR (Mirror Diameter: φ1.0×1.1mm)

mems_mirror_CG0007AR_en

Product Group

MEMS Mirror for Optical Scanners

Overview

Within our range of MEMS mirrors designed for optical scanning applications, this model incorporates a compact mirror element that enables ultra-fast and highly accurate 2D scanning by leveraging its size advantage. It is particularly optimized for display systems requiring sharp image rendering, delivering superior performance in environments where high-resolution visual output is critical.

Specifications

mems_mirror_overview_CG0007AR_en


Main Applications

This product is various optical devices, including:

・HUD (Head-Up Display)
・Pico Projector
・HMD (Head-Mounted Display)

CG0008AR (Mirror Diameter: φ8.0mm)

mems_mirror_CG0008AR_en

Product Group

MEMS Mirror for Optical Scanners

Overview

Among our lineup of MEMS mirrors for optical scanning applications, this model features a large mirror size that enables high-precision 2D scanning while maintaining a broad reflective surface area. The increased mirror dimensions allow for greater light collection, making it particularly suitable for applications such as LiDAR, where high sensitivity and wide field of view (FOV) are essential.

Specifications

mems_mirror_overview_CG0008AR_en


Main Applications

This product is various optical devices, including:

・3DLiDAR
・3D Printer

CG0009AR (Mirror Diameter: φ1.6mm) *Under Development*

mems_mirror_CG0009AR_en

Product Group

MEMS Mirror for Optical Scanners

Overview

Within our lineup of MEMS mirrors for optical scanning applications, this model utilizes a compact mirror design that enables high-speed and high-precision 2D scanning by leveraging the advantages of its reduced size. Compared to the previous model, CG0007AR, this version incorporates a larger mirror, allowing for increased light reflection. As a result, it achieves both enhanced optical efficiency and improved scanning performance, delivering outstanding results even in demanding application environments.

Specifications

mems_mirror_overview_CG0009AR_en


Main Applications

This product is various optical devices, including:

・HUD (Head-Up Display)
・Pico Projector
・HMD (Head-Mounted Display)

Product Lineup

mems_mirror_lineup_en_ver9

Note: These products are currently under development. Specifications may change without prior notice.